Invention Grant
- Patent Title: Replacement gate structures and methods of manufacturing
- Patent Title (中): 替代门结构和制造方法
-
Application No.: US13444447Application Date: 2012-04-11
-
Publication No.: US08946049B2Publication Date: 2015-02-03
- Inventor: Brent A. Anderson , Edward J. Nowak
- Applicant: Brent A. Anderson , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Michael LeStrange
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/762

Abstract:
Gate structures and methods of manufacturing is disclosed. The method includes forming a continuous replacement gate structure within a trench formed in dielectric material. The method further includes segmenting the continuous replacement gate structure into separate replacement gate structures. The method further includes forming insulator material between the separate replacement gate structures.
Public/Granted literature
- US20130270644A1 REPLACEMENT GATE STRUCTURES AND METHODS OF MANUFACTURING Public/Granted day:2013-10-17
Information query
IPC分类: