Invention Grant
US08946076B2 Methods of fabricating integrated structures, and methods of forming vertically-stacked memory cells
有权
制造集成结构的方法,以及形成垂直堆叠的存储单元的方法
- Patent Title: Methods of fabricating integrated structures, and methods of forming vertically-stacked memory cells
- Patent Title (中): 制造集成结构的方法,以及形成垂直堆叠的存储单元的方法
-
Application No.: US13835551Application Date: 2013-03-15
-
Publication No.: US08946076B2Publication Date: 2015-02-03
- Inventor: Fatma Arzum Simsek-Ege , Aaron R. Wilson
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L27/115 ; H01L21/308 ; H01L21/3065 ; H01L21/033

Abstract:
Some embodiments include methods of forming vertically-stacked memory cells. An opening is formed to extend partially through a stack of alternating electrically insulative levels and electrically conductive levels. A liner is formed along sidewalls of the opening, and then the stack is etched to extend the opening. The liner is at least partially consumed during the etch and forms passivation material. Three zones occur during the etch, with one of the zones being an upper zone of the opening protected by the liner, another of the zones being an intermediate zone of the opening protected by passivation material but not the liner, and another of the zones being a lower zone of the opening which is not protected by either passivation material or the liner. Cavities are formed to extend into the electrically conductive levels along sidewalls of the opening. Charge blocking dielectric and charge-storage structures are formed within the cavities.
Public/Granted literature
- US20140273462A1 Methods of Fabricating Integrated Structures, and Methods of Forming Vertically-Stacked Memory Cells Public/Granted day:2014-09-18
Information query
IPC分类: