Invention Grant
US08946590B2 Methods for laser scribing and separating glass substrates 有权
激光划片和分离玻璃基板的方法

  • Patent Title: Methods for laser scribing and separating glass substrates
  • Patent Title (中): 激光划片和分离玻璃基板的方法
  • Application No.: US12952935
    Application Date: 2010-11-23
  • Publication No.: US08946590B2
    Publication Date: 2015-02-03
  • Inventor: Xinghua Li
  • Applicant: Xinghua Li
  • Applicant Address: US NY Corning
  • Assignee: Corning Incorporated
  • Current Assignee: Corning Incorporated
  • Current Assignee Address: US NY Corning
  • Agent John T. Haran
  • Main IPC: B23K26/38
  • IPC: B23K26/38 B23K26/40 C03B33/09
Methods for laser scribing and separating glass substrates
Abstract:
Methods of forming scribe vents in a strengthened glass substrate having a compressive surface layer and an inner tension layer are provided. In one embodiment, a first and second defect is formed to partially expose the inner tension layer. A first scribe vent may be generated in a first scribing direction by translating a laser beam and a cooling jet on a surface of the strengthened glass substrate at a first scribing speed. A second scribe vent intersecting the first scribe vent may be generated in a second scribing direction by translating the laser beam and the cooling jet on the surface of the strengthened glass substrate at a second scribing speed that is greater than the first scribing speed. The defects may be perpendicular to the scribing directions. In another embodiment, the first scribe vent may be fused at an intersection location prior to generating the second scribe vent.
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