Invention Grant
- Patent Title: Beam head
- Patent Title (中): 梁头
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Application No.: US13264368Application Date: 2010-04-08
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Publication No.: US08946657B2Publication Date: 2015-02-03
- Inventor: Manfred Apel , Clemens Fiebiger , Wolfgang Hennig , Roland Schmidt , Björn Österreicher
- Applicant: Manfred Apel , Clemens Fiebiger , Wolfgang Hennig , Roland Schmidt , Björn Österreicher
- Applicant Address: DE München
- Assignee: Siemens Aktiengesellschaft
- Current Assignee: Siemens Aktiengesellschaft
- Current Assignee Address: DE München
- Agency: Lempia Summerfield Katz LLC
- Priority: DE1020090173447 20090414
- International Application: PCT/EP2010/054637 WO 20100408
- International Announcement: WO2010/118982 WO 20101021
- Main IPC: G21K5/00
- IPC: G21K5/00 ; G21K5/04
Abstract:
The present embodiments relate to a beam head including a vacuum housing, in which an electron source is arranged. The beam head also includes a beam finger that is connected to the vacuum housing and has an outlet window at a distal end. The beam head includes a transformer housing, in which a transformer connected to the electron source is arranged. The transformer housing is arranged directly on the vacuum housing.
Public/Granted literature
- US20120025106A1 BEAM HEAD Public/Granted day:2012-02-02
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