Invention Grant
US08946785B2 Ionic field effect transistor having heterogeneous triangular nanochannel and method of manufacturing the same 有权
具有异质三角形纳米通道的离子场效应晶体管及其制造方法

Ionic field effect transistor having heterogeneous triangular nanochannel and method of manufacturing the same
Abstract:
An ionic field effect transistor includes: a substrate; a polymer layer that is formed on the substrate and in which a first flow path and a second flow path that is separately disposed from the first flow path are formed; and a gate electrode that is formed between the substrate and the polymer layer and that contacts the first flow path and the second flow path, wherein a heterogeneous triangular nanochannel that connects the first flow path and the second flow path is formed between the gate electrode and the polymer layer.
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