Invention Grant
- Patent Title: Field effect transistors (FETs) and methods of manufacture
- Patent Title (中): 场效应晶体管(FET)和制造方法
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Application No.: US13762980Application Date: 2013-02-08
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Publication No.: US08946801B2Publication Date: 2015-02-03
- Inventor: Brent A. Anderson , Edward J. Nowak
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole P.C.
- Agent Michael LeStrange
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/94 ; H01L27/108 ; H01L29/78 ; H01L29/66

Abstract:
An improved field effect transistors (FETs) and methods of manufacturing the field effect transistors (FETs) are provided. The method of manufacturing a zero capacitance random access memory cell (ZRAM) includes comprises forming a finFET on a substrate and enhancing a storage capacitance of the finFET. The enhancement can be by either adding a storage capacity to the finFET or altering a portion of the finFET after formation of a fin body of the finFET.
Public/Granted literature
- US20130146956A1 FIELD EFFECT TRANSISTORS (FETS) AND METHODS OF MANUFACTURE Public/Granted day:2013-06-13
Information query
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