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US08946801B2 Field effect transistors (FETs) and methods of manufacture 有权
场效应晶体管(FET)和制造方法

Field effect transistors (FETs) and methods of manufacture
Abstract:
An improved field effect transistors (FETs) and methods of manufacturing the field effect transistors (FETs) are provided. The method of manufacturing a zero capacitance random access memory cell (ZRAM) includes comprises forming a finFET on a substrate and enhancing a storage capacitance of the finFET. The enhancement can be by either adding a storage capacity to the finFET or altering a portion of the finFET after formation of a fin body of the finFET.
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