Invention Grant
- Patent Title: Method for manufacturing semiconductor memory device and semiconductor memory device
- Patent Title (中): 半导体存储器件和半导体存储器件的制造方法
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Application No.: US14017472Application Date: 2013-09-04
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Publication No.: US08946809B2Publication Date: 2015-02-03
- Inventor: Kazuhide Takamura , Ryota Katsumata , Masaru Kidoh , Yoshihiro Uozumi , Daigo Ichinose , Toru Matsuda
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-061112 20130322
- Main IPC: H01L29/792
- IPC: H01L29/792 ; G11C11/34 ; H01L21/8236 ; H01L29/66 ; H01L21/822 ; H01L27/12

Abstract:
According to one embodiment, a method is disclosed for manufacturing a semiconductor memory device. The method includes forming a first stopper film forming a lower gate layer, making a recess in the lower gate layer, filling a sacrificial film into the recess, forming a second stopper film, making an opening in the second stopper film, forming a stacked body. The stacked body includes electrode films and insulating films. The method includes, making a slit in the stacked body, making a hole in the stacked body, removing the sacrificial film via the hole, forming a memory film including a charge storage film. The method includes forming a channel body on a side wall of the memory film. An etching rate of the first stopper film and the second stopper film is lower than an etching rate of the electrode films and the insulating films.
Public/Granted literature
- US20140284691A1 METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE AND SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2014-09-25
Information query
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