Invention Grant
- Patent Title: Switching element
- Patent Title (中): 开关元件
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Application No.: US13739436Application Date: 2013-01-11
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Publication No.: US08946813B2Publication Date: 2015-02-03
- Inventor: Tomohiko Sato
- Applicant: Tomohiko Sato
- Applicant Address: JP Toyota-Shi
- Assignee: Toyota Jidosha Kabushiki Kaisha
- Current Assignee: Toyota Jidosha Kabushiki Kaisha
- Current Assignee Address: JP Toyota-Shi
- Agency: Kenyon & Kenyon LLP
- Priority: JP2012-003876 20120112
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/40 ; H01L29/423 ; H01L29/739 ; H01L29/06

Abstract:
In a switching element, a first region that is exposed on an upper surface of a semiconductor substrate, a second region that is exposed on the upper surface of the substrate and extends to below the first region, and a third region that is formed below the second region, are formed on the substrate. A trench is formed in the upper surface of the substrate. A gate electrode has a first portion that extends from a depth of the first region to a depth of the third region at at least a portion in the trench formed in an area where the first region is exposed, and a second portion that is formed to a depth of the second region, and does not reach the depth of the third region, at at least a portion in the trench formed in an area where the second region is exposed.
Public/Granted literature
- US20130181283A1 SWITCHING ELEMENT Public/Granted day:2013-07-18
Information query
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