Invention Grant
US08946849B2 BSI image sensor chips with separated color filters and methods for forming the same
有权
具有分离滤色片的BSI图像传感器芯片及其形成方法
- Patent Title: BSI image sensor chips with separated color filters and methods for forming the same
- Patent Title (中): 具有分离滤色片的BSI图像传感器芯片及其形成方法
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Application No.: US13592124Application Date: 2012-08-22
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Publication No.: US08946849B2Publication Date: 2015-02-03
- Inventor: Shuang-Ji Tsai , Dun-Nian Yaung , Jen-Cheng Liu , Jeng-Shyan Lin , Feng-Chi Hung
- Applicant: Shuang-Ji Tsai , Dun-Nian Yaung , Jen-Cheng Liu , Jeng-Shyan Lin , Feng-Chi Hung
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/146
Abstract:
A device includes a semiconductor substrate having a front side and a backside. A plurality of image sensors is disposed at the front side of the semiconductor substrate. A plurality of clear color-filters is disposed on the backside of the semiconductor substrate. A plurality of metal rings encircles the plurality of clear color-filters.
Public/Granted literature
- US20130307107A1 BSI Image Sensor Chips with Separated Color Filters and Methods for Forming the Same Public/Granted day:2013-11-21
Information query
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