Invention Grant
US08946854B2 Metal-insulator-metal capacitor structure and method for manufacturing the same
有权
金属 - 绝缘体 - 金属电容器结构及其制造方法
- Patent Title: Metal-insulator-metal capacitor structure and method for manufacturing the same
- Patent Title (中): 金属 - 绝缘体 - 金属电容器结构及其制造方法
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Application No.: US13292156Application Date: 2011-11-09
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Publication No.: US08946854B2Publication Date: 2015-02-03
- Inventor: Ji Feng , Duan-Quan Liao , Hai-Long Gu , Ying-Tu Chen
- Applicant: Ji Feng , Duan-Quan Liao , Hai-Long Gu , Ying-Tu Chen
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corporation
- Current Assignee: United Microelectronics Corporation
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, PC
- Agent Justin King
- Main IPC: H01L29/02
- IPC: H01L29/02 ; H01L23/522 ; H01L49/02

Abstract:
A metal-insulator-metal (MIM) capacitor structure includes a first dielectric layer, a first damascene electrode layer, an insulating barrier layer, a second dielectric layer and a second damascene electrode layer. The first damascene electrode layer is formed in the first dielectric layer. The insulating barrier layer covers the first dielectric layer and the first damascene electrode layer, and is a single layer structure. The second dielectric layer is formed on the insulating barrier layer. The second damascene electrode layer is formed in the second dielectric layer and is contacted with the insulating barrier layer. The MIM capacitor structure can includes a dual damascene structure formed in the second dielectric layer and the insulating barrier layer and electrically connected to the first damascene electrode layer. A method for manufacturing the MIM capacitor structure is also provided.
Public/Granted literature
- US20130113075A1 METAL-INSULATOR-METAL CAPACITOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-05-09
Information query
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