Invention Grant
US08946884B2 Substrate-less interposer technology for a stacked silicon interconnect technology (SSIT) product
有权
用于堆叠硅互连技术(SSIT)产品的无衬底插入技术
- Patent Title: Substrate-less interposer technology for a stacked silicon interconnect technology (SSIT) product
- Patent Title (中): 用于堆叠硅互连技术(SSIT)产品的无衬底插入技术
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Application No.: US13791819Application Date: 2013-03-08
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Publication No.: US08946884B2Publication Date: 2015-02-03
- Inventor: Woon-Seong Kwon , Suresh Ramalingam , Namhoon Kim , Joong-Ho Kim
- Applicant: Xilinx, Inc.
- Applicant Address: US CA San Jose
- Assignee: Xilinx, Inc.
- Current Assignee: Xilinx, Inc.
- Current Assignee Address: US CA San Jose
- Agent John J. King
- Main IPC: H01L23/12
- IPC: H01L23/12 ; H01L23/48 ; H01L23/485 ; H01L21/768 ; H01L23/498 ; H01L21/48 ; H01L21/683 ; H05K3/28 ; H05K3/46 ; H01L23/31 ; H01L21/56 ; H01L23/00 ; H01L25/065 ; H01L25/18

Abstract:
A substrate-less interposer for a stacked silicon interconnect technology (SSIT) product, includes: a plurality of metallization layers, at least a bottom most layer of the metallization layers comprising a plurality of metal segments, wherein each of the plurality of metal segments is formed between a top surface and a bottom surface of the bottom most layer of the metallization layers, and the metal segments are separated by dielectric material in the bottom most layer; and a dielectric layer formed on the bottom surface of the bottom most layer, wherein the dielectric layer includes one or more openings for providing contact to the plurality of metal segments in the bottom most layer.
Public/Granted literature
- US20140252599A1 SUBSTRATE-LESS INTERPOSER TECHNOLOGY FOR A STACKED SILICON INTERCONNECT TECHNOLOGY (SSIT) PRODUCT Public/Granted day:2014-09-11
Information query
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