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US08946884B2 Substrate-less interposer technology for a stacked silicon interconnect technology (SSIT) product 有权
用于堆叠硅互连技术(SSIT)产品的无衬底插入技术

Substrate-less interposer technology for a stacked silicon interconnect technology (SSIT) product
Abstract:
A substrate-less interposer for a stacked silicon interconnect technology (SSIT) product, includes: a plurality of metallization layers, at least a bottom most layer of the metallization layers comprising a plurality of metal segments, wherein each of the plurality of metal segments is formed between a top surface and a bottom surface of the bottom most layer of the metallization layers, and the metal segments are separated by dielectric material in the bottom most layer; and a dielectric layer formed on the bottom surface of the bottom most layer, wherein the dielectric layer includes one or more openings for providing contact to the plurality of metal segments in the bottom most layer.
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