Invention Grant
- Patent Title: Dual-metal self-aligned wires and vias
- Patent Title (中): 双金属自对准导线和通孔
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Application No.: US13961385Application Date: 2013-08-07
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Publication No.: US08946908B2Publication Date: 2015-02-03
- Inventor: Steven J. Holmes , David V. Horak , Charles W. Koburger, III , Shom Ponoth , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Catherine Ivers; Ira D. Blecker
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L23/485 ; H01L21/768 ; H01L23/528 ; H01L23/532

Abstract:
Disclosed is a semiconductor structure which includes a semiconductor substrate and a wiring layer on the semiconductor substrate. The wiring layer includes a plurality of fin-like structures comprising a first metal; a first layer of a second metal on each of the plurality of fin-like structures wherein the first metal is different from the second metal, the first layer of the second metal having a height less than each of the plurality of fin-like structures; and an interlayer dielectric (ILD) covering the plurality of fin-like structures and the first layer of the second metal except for exposed edges of the plurality of fin-like structures at predetermined locations, and at locations other than the predetermined locations, the height of the plurality of fin-like structures has been reduced so as to be covered by the ILD.
Public/Granted literature
- US20130320546A1 DUAL-METAL SELF-ALIGNED WIRES AND VIAS Public/Granted day:2013-12-05
Information query
IPC分类: