Invention Grant
- Patent Title: Micromachined resonant magnetic field sensors
- Patent Title (中): 微机械谐振磁场传感器
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Application No.: US13004383Application Date: 2011-01-11
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Publication No.: US08947081B2Publication Date: 2015-02-03
- Inventor: Joseph Seeger , Chiung C. Lo , Baris Cagdaser , Derek Shaeffer
- Applicant: Joseph Seeger , Chiung C. Lo , Baris Cagdaser , Derek Shaeffer
- Applicant Address: US CA San Jose
- Assignee: Invensense, Inc.
- Current Assignee: Invensense, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Sawyer Law Group, P.C.
- Main IPC: G01R33/02
- IPC: G01R33/02 ; G01R33/038 ; G01R33/028

Abstract:
A micromachined magnetic field sensor is disclosed. The micromachined magnetic field sensor includes a substrate; and a drive subsystem partially supported by the substrate with a plurality of beams, and at least one anchor; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field vector along a third axis. The micromachined magnetic field sensor also includes a position transducer to detect the motion of the drive subsystem and an electrostatic offset cancellation mechanism coupled to the drive subsystem.
Public/Granted literature
- US20120176129A1 MICROMACHINED RESONANT MAGNETIC FIELD SENSORS Public/Granted day:2012-07-12
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