Invention Grant
- Patent Title: Electromechanical resonator with resonant anchor
- Patent Title (中): 具有谐振锚的机电谐振器
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Application No.: US13375627Application Date: 2010-06-07
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Publication No.: US08947176B2Publication Date: 2015-02-03
- Inventor: Sebastien Hentz , Julien Arcamone
- Applicant: Sebastien Hentz , Julien Arcamone
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0953820 20090609
- International Application: PCT/EP2010/057928 WO 20100607
- International Announcement: WO2010/142643 WO 20101216
- Main IPC: H03H9/24
- IPC: H03H9/24 ; H03H9/50 ; H03H9/02 ; H03H3/007
Abstract:
An electromechanical resonator produced on a substrate, and a method of producing thereof, including: a suspended structure produced at least partly from the substrate, configured to have a vibration imparted to it such that it resonates at least one natural resonance frequency of the suspended structure; an anchor structure to anchor the suspended structure, by at least one area of its periphery, to the remainder of the substrate, and dimensioned to resonate at the resonance frequency; a mechanism to excite the suspended structure, to cause it to vibrate at the resonance frequency; and a mechanism to detect the vibration frequency of the suspended structure.
Public/Granted literature
- US20120092082A1 ELECTROMECHANICAL RESONATOR WITH RESONANT ANCHOR Public/Granted day:2012-04-19
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