Invention Grant
US08947610B2 Display device comprising a TFT with a barrier metal formed of a first layer and a second layer wherein an amount of oxygen in the first layer is larger than in the second layer
有权
显示装置,包括具有由第一层和第二层形成的阻挡金属的TFT,其中第一层中的氧的量大于第二层中的氧量
- Patent Title: Display device comprising a TFT with a barrier metal formed of a first layer and a second layer wherein an amount of oxygen in the first layer is larger than in the second layer
- Patent Title (中): 显示装置,包括具有由第一层和第二层形成的阻挡金属的TFT,其中第一层中的氧的量大于第二层中的氧量
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Application No.: US14449717Application Date: 2014-08-01
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Publication No.: US08947610B2Publication Date: 2015-02-03
- Inventor: Taro Asai , Jun Gotoh , Eiji Oue , Hiroaki Asuma , Katsumi Nakayashiki , Makoto Kurita
- Applicant: Japan Display Inc. , Panasonic Liquid Crystal Display Co., Ltd.
- Applicant Address: JP Tokyo JP Himeji-Shi
- Assignee: Japan Display Inc.,Panasonic Liquid Crystal Display Co. Ltd.
- Current Assignee: Japan Display Inc.,Panasonic Liquid Crystal Display Co. Ltd.
- Current Assignee Address: JP Tokyo JP Himeji-Shi
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2010-032439 20100217
- Main IPC: G02F1/136
- IPC: G02F1/136 ; G02F1/1343 ; G02F1/133 ; H01L27/32 ; H01L27/12 ; H01L29/786

Abstract:
An organic EL display device includes scanning lines, video signal lines, and pixels, each including a TFT having a semiconductor layer and an organic EL layer located between a lower electrode and an upper electrode. A source electrode connecting the semiconductor layer and the lower electrode is formed of three layers including a barrier metal, an Al-containing metal, and a cap metal. The barrier metal is formed of a first layer in contact with the semiconductor layer and a second layer in contact with the Al-containing metal. Each of the first layer, the second layer, and the cap metal is formed of a metal comprising a high melting point metal, and an amount of oxygen in the first layer is larger than an amount of oxygen in the second layer.
Public/Granted literature
Information query
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