Invention Grant
US08947634B2 Apparatus for supporting an optical element, and method of making same
有权
用于支撑光学元件的装置及其制造方法
- Patent Title: Apparatus for supporting an optical element, and method of making same
- Patent Title (中): 用于支撑光学元件的装置及其制造方法
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Application No.: US12933506Application Date: 2009-04-15
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Publication No.: US08947634B2Publication Date: 2015-02-03
- Inventor: Windy Lynn Farnsworth , Sohrab Simani
- Applicant: Windy Lynn Farnsworth , Sohrab Simani
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- International Application: PCT/EP2009/002749 WO 20090415
- International Announcement: WO2009/127400 WO 20091022
- Main IPC: G03F7/20
- IPC: G03F7/20
Abstract:
An apparatus for supporting an optical element is provided. The apparatus includes a lens cell (1003) and a plurality of fingers (1000) coupled to the lens cell. Each finger includes a base (1012) configured to be coupled to the optical element when mounted therein, first (1006a) and second (1006b) flexures coupled at first respective ends to and extending from the base (1012) at a divergence angle between about 75 and 165 degrees, and a mounting member (1008) configured to couple together second respective ends of the first and second flexures. The mounting member thereby couples the base (1012) to the lens cell (1003).
Public/Granted literature
- US20110109891A1 Apparatus for Supporting and Optical Element, and Method of Making Same Public/Granted day:2011-05-12
Information query
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