Invention Grant
US08947782B2 Wavelength variable interference filter, optical module, and light analyzer
有权
波长可变干涉滤光片，光模块和光分析仪
- Patent Title: Wavelength variable interference filter, optical module, and light analyzer
- Patent Title (中): 波长可变干涉滤光片，光模块和光分析仪
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Application No.: US13219925Application Date: 2011-08-29
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Publication No.: US08947782B2Publication Date: 2015-02-03
- Inventor: Nozomu Hirokubo , Koji Kitahara
- Applicant: Nozomu Hirokubo , Koji Kitahara
- Applicant Address: JP
- Assignee: Seiko Epson Company
- Current Assignee: Seiko Epson Company
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2010-253956 20101112
- Main IPC: G02F1/03
- IPC: G02F1/03 ; G02F1/07 ; G02B27/00 ; G02B5/28 ; G01J3/26 ; G01J3/51
Abstract:
A wavelength variable interference filter includes: a first movable mirror disposed on a first substrate; a second movable mirror disposed so as to be opposed to the first movable mirror with a predetermined gap interposed therebetween; and an electrostatic actuator which varies the length of the gap between the mirrors. The first substrate has a first movable portion on which the first movable mirror is disposed, and a first linkage portion which holds the first movable portion in such a manner that the first movable portion can shift in the thickness direction of the substrate. The second substrate has a second movable portion on which the second movable mirror is disposed, and a second linkage portion which holds the second movable portion in such a manner that the second movable portion can shift in the thickness direction of the substrate.
Public/Granted literature
- US20120120402A1 WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL MODULE, AND LIGHT ANALYZER Public/Granted day:2012-05-17
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