Invention Grant
- Patent Title: Semiconductor laser device and method of fabricating the same
- Patent Title (中): 半导体激光器件及其制造方法
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Application No.: US13545889Application Date: 2012-07-10
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Publication No.: US08948224B2Publication Date: 2015-02-03
- Inventor: In Gyoo Kim , Gyungock Kim , Sang Hoon Kim , JiHo Joo , Ki Seok Jang
- Applicant: In Gyoo Kim , Gyungock Kim , Sang Hoon Kim , JiHo Joo , Ki Seok Jang
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2011-0136674 20111216
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The inventive concept provides semiconductor laser devices and methods of fabricating the same. According to the method, a silicon-crystalline germanium layer for emitting a laser may be formed in a selected region by a selective epitaxial growth (SEG) method. Thus, surface roughness of both ends of a Fabry Perot cavity formed of the silicon-crystalline germanium layer may be reduced or minimized, and a cutting process and a polishing process may be omitted in the method of fabricating the semiconductor laser device.
Public/Granted literature
- US20130156057A1 SEMICONDUCTOR LASER DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2013-06-20
Information query
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