Invention Grant
- Patent Title: MEMS microphone
- Patent Title (中): MEMS麦克风
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Application No.: US13196652Application Date: 2011-08-02
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Publication No.: US08948420B2Publication Date: 2015-02-03
- Inventor: Andrew J. Doller , Michael Peter Knauss , Philip Sean Stetson
- Applicant: Andrew J. Doller , Michael Peter Knauss , Philip Sean Stetson
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Michael Best & Friedrich LLP
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R19/00 ; H04R31/00
Abstract:
A MEMS microphone. The MEMS microphone includes a substrate, a transducer support that includes or supports a transducer, a housing, and an acoustic channel. The transducer support resides on the substrate. The housing surrounds the transducer support and includes an acoustic aperture. The acoustic channel couples the acoustic aperture to the transducer, and isolates the transducer from an interior area of the MEMS microphone.
Public/Granted literature
- US20130034257A1 MEMS MICROPHONE Public/Granted day:2013-02-07
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