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US08949064B2 Measurement method and measurement system using the same 有权
测量方法和使用该测量方法的测量系统

Measurement method and measurement system using the same
Abstract:
Example embodiments relate to a measurement method of measuring lots with improved process efficiency. The measurement method may include calculating a measurement capability (indicating a degree to which members to be measured may be processed per unit time in a measurement device); allocating the measurement capability according to a processing device and a processing condition; and calculating a measurement ratio of the lots processed by the processing device and the processing condition.
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