Invention Grant
US08950259B2 Element structure, inertia sensor, and electronic device 有权
元件结构,惯性传感器和电子设备

Element structure, inertia sensor, and electronic device
Abstract:
The manufacturing of an element structure including two or more sensor element is to be facilitated. An element structure includes a first substrate including a first support layer and a first sensor element disposed on the first support layer and a second substrate including a second support layer and a second sensor element disposed on the second support layer, wherein the second substrate is disposed on the first substrate via a spacer member in a state in which the first sensor element and the second sensor element are disposed to face each other.
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