Invention Grant
- Patent Title: High selectivity slurry delivery system
- Patent Title (中): 高选择性浆料输送系统
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Application No.: US11115065Application Date: 2005-04-25
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Publication No.: US08951095B2Publication Date: 2015-02-10
- Inventor: Randall Lujan , Ahmed Ali , Michelle Garel , Josh Tucker
- Applicant: Randall Lujan , Ahmed Ali , Michelle Garel , Josh Tucker
- Applicant Address: US TX Austin KR Yongin
- Assignee: Samsung Austin Semiconductor, L.P.,Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Austin Semiconductor, L.P.,Samsung Electronics Co., Ltd.
- Current Assignee Address: US TX Austin KR Yongin
- Main IPC: B24B57/02
- IPC: B24B57/02

Abstract:
Various embodiments of a semiconductor processing fluid delivery system and a method delivering a semiconductor processing fluid are provided. In aspect, a system for delivering a liquid for performing a process is provided that includes a first flow controller that has a first fluid input coupled to a first source of fluid and a second flow controller that has a second fluid input coupled to a second source of fluid. A controller is provided for generating an output signal to and thereby controlling discharges from the first and second flow controllers. A variable resistor is coupled between an output of the controller and an input of the second flow controller whereby the output signal of the controller and the resistance of the variable resistor may be selected to selectively control discharge of fluid from the first and second flow controllers.
Public/Granted literature
- US20050250419A1 High selectivity slurry delivery system Public/Granted day:2005-11-10
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