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US08951346B2 Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof 有权
用于提升硅单晶的硅玻璃坩埚及其制造方法

Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
Abstract:
A silica glass crucible for pulling up a silicon single crystal including an outer layer formed from a natural silica glass layer, and an inner layer formed from a synthetic silica glass layer, wherein the synthetic silica glass layer includes a first synthetic silica glass layer formed in a region within a certain range from the center of a crucible bottom section, and a second synthetic silica glass layer formed in a region which excludes the formation region of the first synthetic silica glass layer, and wherein the first synthetic silica glass layer has a thickness of 0.5 mm or more and 1.5 mm or less and a concentration of an OH group included in the first synthetic silica glass layer being 100 ppm or less.
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