Invention Grant
- Patent Title: Treatment of synthetic quartz glass substrate
- Patent Title (中): 合成石英玻璃基板的处理
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Application No.: US13162790Application Date: 2011-06-17
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Publication No.: US08951386B2Publication Date: 2015-02-10
- Inventor: Harunobu Matsui , Ryouhei Hasegawa , Masaki Takeuchi
- Applicant: Harunobu Matsui , Ryouhei Hasegawa , Masaki Takeuchi
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP.
- Priority: JP2010-139052 20100618
- Main IPC: B32B38/10
- IPC: B32B38/10 ; G03F7/16 ; G03F7/42 ; H01L21/00 ; G03F1/00
Abstract:
A synthetic quartz glass substrate having a resist film coated thereon is treated by immersing it in a terpene-containing solvent until the resist film is released, and rinsing the substrate with water.
Public/Granted literature
- US20110308737A1 TREATMENT OF SYNTHETIC QUARTZ GLASS SUBSTRATE Public/Granted day:2011-12-22
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