Invention Grant
US08951837B2 Submicron connection layer and method for using the same to connect wafers 有权
亚微米连接层及其使用方法连接晶圆

Submicron connection layer and method for using the same to connect wafers
Abstract:
A submicron connection layer and a method for using the same to connect wafers is disclosed. The connection layer comprises a bottom metal layer formed on a connection surface of a wafer, an intermediary diffusion-buffer metal layer formed on the bottom metal layer, and a top metal layer formed on the intermediary diffusion-buffer metal layer. The melting point of the intermediary diffusion-buffer metal layer is higher bottom metal layers may form a eutectic phase. During bonding wafers, two top metal layers are joined in a liquid state; next the intermediary diffusion-buffer metal layers are distributed uniformly in the molten top metal layers; then the top and bottom metal layers diffuse to each other to form a low-resistivity eutectic intermetallic compound until the top metal layers are completely exhausted by the bottom metal layers.
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