Invention Grant
- Patent Title: Submicron connection layer and method for using the same to connect wafers
- Patent Title (中): 亚微米连接层及其使用方法连接晶圆
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Application No.: US13605849Application Date: 2012-09-06
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Publication No.: US08951837B2Publication Date: 2015-02-10
- Inventor: Kuan-Neng Chen , Yao-Jen Chang
- Applicant: Kuan-Neng Chen , Yao-Jen Chang
- Applicant Address: TW Hsinchu
- Assignee: National Chiao Tung University
- Current Assignee: National Chiao Tung University
- Current Assignee Address: TW Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW101124384A 20120706
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/30 ; H01L21/46

Abstract:
A submicron connection layer and a method for using the same to connect wafers is disclosed. The connection layer comprises a bottom metal layer formed on a connection surface of a wafer, an intermediary diffusion-buffer metal layer formed on the bottom metal layer, and a top metal layer formed on the intermediary diffusion-buffer metal layer. The melting point of the intermediary diffusion-buffer metal layer is higher bottom metal layers may form a eutectic phase. During bonding wafers, two top metal layers are joined in a liquid state; next the intermediary diffusion-buffer metal layers are distributed uniformly in the molten top metal layers; then the top and bottom metal layers diffuse to each other to form a low-resistivity eutectic intermetallic compound until the top metal layers are completely exhausted by the bottom metal layers.
Public/Granted literature
- US20140008801A1 SUBMICRON CONNECTION LAYER AND METHOD FOR USING THE SAME TO CONNECT WAFERS Public/Granted day:2014-01-09
Information query
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