Invention Grant
- Patent Title: Complementary doping methods and devices fabricated therefrom
- Patent Title (中): 互补掺杂方法和由其制造的器件
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Application No.: US12957329Application Date: 2010-11-30
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Publication No.: US08951895B2Publication Date: 2015-02-10
- Inventor: Kevin Andrew Brenner , Raghunath Murali
- Applicant: Kevin Andrew Brenner , Raghunath Murali
- Applicant Address: US GA Atlanta
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Current Assignee Address: US GA Atlanta
- Agency: Troutman Sanders, LLP
- Agent Ryan A. Schneider; Elizabeth-Ann Gould
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L29/16 ; B82Y10/00 ; H01L21/04 ; H01L29/06 ; H01L29/10 ; H01L29/12 ; H01L29/41 ; H01L29/66

Abstract:
Improved complementary doping methods are described herein. The complementary doping methods generally involve inducing a first and second chemical reaction in at least a first and second portion, respectively, of a dopant source, which has been disposed on a thin film of a semiconductor or semimetal material. The chemical reactions result in the introduction of an n-type dopant, a p-type dopant, or both from the dopant source to each of the first and second portions of the thin film of the semiconductor or semimetal. Ultimately, the methods produce at least one n-type and at least one p-type region in the thin film of the semiconductor or semimetal.
Public/Granted literature
- US20110127638A1 COMPLEMENTARY DOPING METHODS AND DEVICES FABRICATED THEREFROM Public/Granted day:2011-06-02
Information query
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