Invention Grant
US08952204B2 Sulfonium salt, method for producing the same, and photoacid generator 有权
锍盐,其制备方法和光酸发生剂

Sulfonium salt, method for producing the same, and photoacid generator
Abstract:
A sulfonium salt compound represented by the following general formula (I): where R1 and R2 each denote the same or a different alkyl group having 1 to 18 carbon atoms, R3 and R4 each denote the same or a different alkyl group having 1 to 10 carbon atoms, X− denotes a sulfonate anion or a carboxylate anion, and the substituents denoted by R3O and R4O are each located at an arbitrary position selected from the 2-position to the 8-position of the naphthyl group.
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