Invention Grant
US08952267B2 Electric connecting structure comprising preferred oriented Cu6Sn5 grains and method for fabricating the same
有权
包含优选的取向Cu 6 Sn 5晶粒的电连接结构及其制造方法
- Patent Title: Electric connecting structure comprising preferred oriented Cu6Sn5 grains and method for fabricating the same
- Patent Title (中): 包含优选的取向Cu 6 Sn 5晶粒的电连接结构及其制造方法
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Application No.: US13829256Application Date: 2013-03-14
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Publication No.: US08952267B2Publication Date: 2015-02-10
- Inventor: Chih Chen , Han-Wen Lin
- Applicant: National Chiao Tung University
- Applicant Address: TW Hsinchu
- Assignee: National Chiao Tung University
- Current Assignee: National Chiao Tung University
- Current Assignee Address: TW Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW101116641A 20120510
- Main IPC: H05K1/09
- IPC: H05K1/09 ; H05K3/40 ; H01R13/03 ; H01R43/02 ; H01L23/00 ; H01L21/48 ; B23K1/00

Abstract:
An electric connecting structure comprising preferred oriented Cu6Sn5 grains and a method for fabricating the same are disclosed. The method of the present invention comprises steps: (A) providing a first substrate; (B) forming a first nano-twinned copper layer on part of a surface of the first substrate; (C) using a solder to connect the first substrate with a second substrate having a second electrical pad, in which the second electrical pad comprises a second nano-twinned copper layer, and the solder locates between the first nano-twinned copper layer and the second nano-twinned copper layer; and (D) reflowing at the temperature of 200° C. to 300° C. to transform at least part of the solder into an intermetallic compound (IMC) layer, in which the IMC layer comprises plural Cu6Sn5 grains with a preferred orientation; wherein at least 50% in volume of the first and second nano-twinned copper layer comprises plural grains.
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