Invention Grant
- Patent Title: MOSFET formed on an SOI wafer with a back gate
- Patent Title (中): 在具有背栅的SOI晶片上形成MOSFET
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Application No.: US13580053Application Date: 2011-11-18
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Publication No.: US08952453B2Publication Date: 2015-02-10
- Inventor: Huilong Zhu , Qingqing Liang , Haizhou Yin , Zhijiong Luo
- Applicant: Huilong Zhu , Qingqing Liang , Haizhou Yin , Zhijiong Luo
- Applicant Address: CN
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN
- Agency: Schwegman Lundberg & Woessner, P.A.
- Priority: CN201110308554 20111012
- International Application: PCT/CN2011/082415 WO 20111118
- International Announcement: WO2013/053166 WO 20130418
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/84 ; H01L29/66 ; H01L29/786

Abstract:
The present application discloses a MOSFET and a method for manufacturing the same. The MOSFET is formed on an SOI wafer, comprising: a shallow trench isolation for defining an active region in the semiconductor layer; a gate stack on the semiconductor layer; a source region and a drain region in the semiconductor layer on both sides of the gate stack; a channel region in the semiconductor layer and sandwiched by the source region and the drain region; a back gate in the semiconductor substrate; a first dummy gate stack overlapping with a boundary between the semiconductor layer and the shallow trench isolation; and a second dummy gate stack on the shallow trench isolation, wherein the MOSFET further comprises a plurality of conductive vias which are disposed between the gate stack and the first dummy gate stack and electrically connected to the source region and the drain region respectively, and between the first dummy gate stack and the second dummy gate stack and electrically connected to the back gate. The MOSFET avoids short circuit between the back gate and the source/drain regions by the dummy gate stacks.
Public/Granted literature
- US20130093020A1 MOSFET AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-04-18
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