Invention Grant
US08952467B2 Electronic device and its manufacturing method 有权
电子器件及其制造方法

Electronic device and its manufacturing method
Abstract:
An electronic device includes a substrate, a sidewall that is disposed on the substrate and forms a cavity, a first layer that is disposed on the sidewall and covers the cavity, a second layer that is formed on the first layer and has a region disposed outside an outline of the first layer in a plan view, a dielectric layer disposed below the region of the second layer disposed outside the outline of the first layer in a plan view, and a functional element disposed inside the cavity.
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