Invention Grant
- Patent Title: Electrical fuse and method of making the same
- Patent Title (中): 电熔丝及其制作方法
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Application No.: US13085568Application Date: 2011-04-13
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Publication No.: US08952486B2Publication Date: 2015-02-10
- Inventor: Chih-Chao Yang , Stephen M. Gates , Baozhen Li , Dan Edelstein
- Applicant: Chih-Chao Yang , Stephen M. Gates , Baozhen Li , Dan Edelstein
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Catherine Ivers; Reza Sarbakhsh
- Main IPC: H01L23/525
- IPC: H01L23/525

Abstract:
An improved electrical-fuse (e-fuse) device including a dielectric layer having a first top surface, two conductive features embedded in the dielectric layer and a fuse element. Each conductive feature has a second top surface and a metal cap directly on the second top surface. Each metal cap has a third top surface that is above the first top surface of the dielectric layer. The fuse element is on the third top surface of each metal cap and on the first top surface of the dielectric layer. A method of forming the e-fuse device is also provided.
Public/Granted literature
- US20120261793A1 ELECTRICAL FUSE AND METHOD OF MAKING THE SAME Public/Granted day:2012-10-18
Information query
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