Invention Grant
- Patent Title: Capacitive element
- Patent Title (中): 电容元件
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Application No.: US13690241Application Date: 2012-11-30
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Publication No.: US08952491B2Publication Date: 2015-02-10
- Inventor: Shunsuke Kurachi
- Applicant: Sumitomo Electric Device Innovations, Inc.
- Applicant Address: JP Yokohama-shi
- Assignee: Sumitomo Electric Device Innovations, Inc.
- Current Assignee: Sumitomo Electric Device Innovations, Inc.
- Current Assignee Address: JP Yokohama-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2011-262691 20111130
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/92 ; H01L49/02
Abstract:
A capacitive element includes: an upper electrode; a lower electrode; and a dielectric layer that is disposed between the upper electrode and the lower electrode, and includes a first film, a second film and a third film which are made of any one of silicon nitride and aluminum oxide and laminated from a side of the lower electrode in order, a composition ratio of any one of silicon and aluminum in each of the first film and the third film being larger than a corresponding composition ratio in the second film.
Public/Granted literature
- US20130134555A1 CAPACITIVE ELEMENT Public/Granted day:2013-05-30
Information query
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