Invention Grant
US08952595B2 Micro-electro-mechanical transducers 有权
微机电换能器

Micro-electro-mechanical transducers
Abstract:
Some examples include at least one capacitive micro-electro-mechanical transducer (cMUT). For instance, the cMUT may include a substrate, a plate, and a resilient structure therebetween. In some examples, an integrated circuit may be formed on or integrated with the plate or other portion of the cMUT. Furthermore, in some examples, two cMUTs may be arranged in a stacked configuration. For instance, one cMUT may be operable for transmission, while a second cMUT may be operable for reception.
Public/Granted literature
Information query
Patent Agency Ranking
0/0