Invention Grant
- Patent Title: Tagging of functional blocks of a semiconductor component on a wafer
- Patent Title (中): 标记晶片上半导体元件的功能块
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Application No.: US13025665Application Date: 2011-02-11
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Publication No.: US08952712B2Publication Date: 2015-02-10
- Inventor: Arya Reza Behzad , Ahmadreza Rofougaran , Sam Ziqun Zhao , Jesus Alfonso Castaneda , Michael Boers
- Applicant: Arya Reza Behzad , Ahmadreza Rofougaran , Sam Ziqun Zhao , Jesus Alfonso Castaneda , Michael Boers
- Applicant Address: US CA Irvine
- Assignee: Broadcom Corporation
- Current Assignee: Broadcom Corporation
- Current Assignee Address: US CA Irvine
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G01R31/36
- IPC: G01R31/36 ; G01R31/319 ; G01R31/302 ; G01R31/311 ; H01L23/544 ; G01R31/28

Abstract:
Methods and apparatus are disclosed to simultaneously, wirelessly test semiconductor components formed on a semiconductor wafer. The semiconductor components transmit respective outcomes of a self-contained testing operation to wireless automatic test equipment via a common communication channel. Multiple receiving antennas observe the outcomes from multiple directions in three dimensional space. The wireless automatic test equipment determines whether one or more of the semiconductor components operate as expected and, optionally, may use properties of the three dimensional space to determine a location of one or more of the semiconductor components. The wireless testing equipment may additionally determine performance of the semiconductor components by detecting infrared energy emitted, transmitted, and/or reflected by the semiconductor wafer before, during, and/or after a self-contained testing operation.
Public/Granted literature
- US20110309851A1 Tagging of Functional Blocks of a Semiconductor Component on a Wafer Public/Granted day:2011-12-22
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