Invention Grant
US08952765B2 System and methods of bimodal automatic power and frequency tuning of RF generators
有权
射频发生器的双模自动功率和频率调谐的系统和方法
- Patent Title: System and methods of bimodal automatic power and frequency tuning of RF generators
- Patent Title (中): 射频发生器的双模自动功率和频率调谐的系统和方法
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Application No.: US13803170Application Date: 2013-03-14
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Publication No.: US08952765B2Publication Date: 2015-02-10
- Inventor: Larry J. Fisk, II , Amish Rughoonundon
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: H03C1/00
- IPC: H03C1/00 ; H03B5/12 ; H01J37/32 ; H03F3/20 ; H03K3/55

Abstract:
A radio frequency generator includes a power control module, a frequency control module and a pulse generating module. The power control module is configured to generate a power signal indicating power levels for target states of a power amplifier. The frequency control module is configured to generate a frequency signal indicating frequencies for the target states of the power amplifier. The pulse generating module is configured to (i) supply an output signal to the power amplifier, (ii) recall at least one of a latest power level or a latest frequency for one of the target states of the power amplifier, and (iii) adjust a current power level and a current frequency of the output signal from a first state to a second state based on the power signal, the frequency signal, and at least one of the latest power level and the latest frequency of the power amplifier.
Public/Granted literature
- US20140097908A1 System and Methods of Bimodal Automatic Power and Frequency Tuning of RF Generators Public/Granted day:2014-04-10
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