Invention Grant
US08952768B2 Optimal acoustic impedance materials for polished substrate coating to suppress passband ripple in BAW resonators and filters
有权
用于抛光衬底涂层的最佳声阻抗材料，以抑制BAW谐振器和滤波器中的通带纹波
- Patent Title: Optimal acoustic impedance materials for polished substrate coating to suppress passband ripple in BAW resonators and filters
- Patent Title (中): 用于抛光衬底涂层的最佳声阻抗材料，以抑制BAW谐振器和滤波器中的通带纹波
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Application No.: US13971721Application Date: 2013-08-20
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Publication No.: US08952768B2Publication Date: 2015-02-10
- Inventor: Edward Martin Godshalk , Rick D. Lutz , Masud Hannan , Ralph N. Wall , Uppili Sridhar
- Applicant: TriQuint Semiconductor, Inc.
- Applicant Address: US OR Hillsboro
- Assignee: Triquint Semiconductor, Inc.
- Current Assignee: Triquint Semiconductor, Inc.
- Current Assignee Address: US OR Hillsboro
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: H03H9/00
- IPC: H03H9/00 ; H03H9/02 ; H03H9/15 ; H03H9/17
Abstract:
A bulk acoustic wave (BAW) resonator is constructed to reduce phase and amplitude ripples in a frequency response. The BAW resonator is fabricated on a substrate 400 μm thick or less, preferably approximately 325 μm, having a first side and a polished second side with a peak-to-peak roughness of approximately 1000 A. A Bragg mirror having alternate layers of a high acoustic impedance material, such as tungsten, and a low acoustic impedance material is fabricated on the first side of the substrate. A BAW resonator is fabricated on the Bragg mirror. A lossy material, such as epoxy, coats the second side of the substrate opposite the first side. The lossy material has an acoustic impedance in the range of 0.01× to 1.0× the acoustic impedance of the layers of high acoustic impedance material.
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