Invention Grant
- Patent Title: System for viewing samples that are undergoing ellipsometric investigation in real time
- Patent Title (中): 用于查看正在进行椭偏仪调查的样品的系统
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Application No.: US13385762Application Date: 2012-03-06
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Publication No.: US08953030B1Publication Date: 2015-02-10
- Inventor: Martin M. Liphardt , Galen L. Pfeiffer
- Applicant: Martin M. Liphardt , Galen L. Pfeiffer
- Applicant Address: US NE Lincoln
- Assignee: J.A. Woollam Co., Inc.
- Current Assignee: J.A. Woollam Co., Inc.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: H04N7/18
- IPC: H04N7/18
Abstract:
In the context of an ellipsometer or the like, positioning a camera other than directly above a sample being investigated by an electromagnetic beam, while said camera provides an optical view of a surface of said sample which is in focus over the entire viewed extent of the sample.
Information query
