Invention Grant
US08953174B2 Displacement measuring apparatus and apparatus that measure relative displacement between structure and sensor 有权
测量结构和传感器之间的相对位移的位移测量装置和装置

Displacement measuring apparatus and apparatus that measure relative displacement between structure and sensor
Abstract:
A displacement measuring apparatus includes a light source configured to illuminate light, and a photodetector provided on a structure and configured to detect reflected light from a reflection portion of a scale that alternately and periodically includes a convex portion scattering the light from the light source and the reflection portion reflecting the light, the displacement measuring apparatus measures a relative displacement between the structure and the photodetector based on a detection result from the photodetector, a length of the reflection portion in a period direction of the scale is greater than a half of a sum of lengths of the convex portion and the reflection portion, and the reflection portion includes a curved concave portion that reflects and collects the light illuminated from the light source.
Information query
Patent Agency Ranking
0/0