Invention Grant
- Patent Title: Displacement measuring apparatus and apparatus that measure relative displacement between structure and sensor
- Patent Title (中): 测量结构和传感器之间的相对位移的位移测量装置和装置
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Application No.: US13798399Application Date: 2013-03-13
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Publication No.: US08953174B2Publication Date: 2015-02-10
- Inventor: Takashi Fukuhara
- Applicant: Canon Kabushiki Kaisha
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2012-061463 20120319
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G01D5/347

Abstract:
A displacement measuring apparatus includes a light source configured to illuminate light, and a photodetector provided on a structure and configured to detect reflected light from a reflection portion of a scale that alternately and periodically includes a convex portion scattering the light from the light source and the reflection portion reflecting the light, the displacement measuring apparatus measures a relative displacement between the structure and the photodetector based on a detection result from the photodetector, a length of the reflection portion in a period direction of the scale is greater than a half of a sum of lengths of the convex portion and the reflection portion, and the reflection portion includes a curved concave portion that reflects and collects the light illuminated from the light source.
Public/Granted literature
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