Invention Grant
- Patent Title: Electrostatic chuck robotic system
- Patent Title (中): 静电吸盘机器人系统
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Application No.: US13307089Application Date: 2011-11-30
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Publication No.: US08953298B2Publication Date: 2015-02-10
- Inventor: Chung-En Kao , You-Hua Chou , Chih-Tsung Lee , Ming-Shiou Kuo
- Applicant: Chung-En Kao , You-Hua Chou , Chih-Tsung Lee , Ming-Shiou Kuo
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01T23/00

Abstract:
A workpiece transfer system has a plurality of joints having a bearing and a primary and secondary transformer coil, wherein power provided to the primary transformer coil and secondary transformer coil of each joint produces mutual inductance between the primary and secondary transformer coil of the respective joint. A first pair of arms are rotatably coupled to a blade by a first pair of the joints, wherein the primary transformer coil of each of the first pair of joints is operably coupled to the first pair of arms, and the secondary transformer coil of each of the first pair of joints is operably coupled to the blade and an electrode beneath a dielectric workpiece retaining surface of the blade. The electrode is contactlessly energized through the transformer coils of the joint and the blade can chuck and de-chuck a workpiece by reversing current directions and by voltage adjustment.
Public/Granted literature
- US20130135784A1 Electrostatic Chuck Robotic System Public/Granted day:2013-05-30
Information query
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