Invention Grant
- Patent Title: III-nitride semiconductor laser device and method for fabricating III-nitride semiconductor laser device
- Patent Title (中): III族氮化物半导体激光器件及其制造方法
-
Application No.: US13354053Application Date: 2012-01-19
-
Publication No.: US08953656B2Publication Date: 2015-02-10
- Inventor: Takashi Kyono , Shimpei Takagi , Takamichi Sumitomo , Yusuke Yoshizumi , Yohei Enya , Masaki Ueno , Katsunori Yanashima
- Applicant: Takashi Kyono , Shimpei Takagi , Takamichi Sumitomo , Yusuke Yoshizumi , Yohei Enya , Masaki Ueno , Katsunori Yanashima
- Applicant Address: JP Osaka-shi JP Tokyo
- Assignee: Sumitomo Electric Industries, Ltd.,Sony Corporation
- Current Assignee: Sumitomo Electric Industries, Ltd.,Sony Corporation
- Current Assignee Address: JP Osaka-shi JP Tokyo
- Agency: Venable LLP
- Agent Michael A. Sartori; Tamatane J. Aga
- Priority: JP2011-011117 20110121
- Main IPC: H01S5/00
- IPC: H01S5/00 ; H01S5/343 ; H01S5/32 ; H01S5/02 ; H01S5/10 ; H01S5/20

Abstract:
A Group III nitride semiconductor laser device includes a laser structure including a support substrate with a semipolar primary surface of a hexagonal Group III nitride semiconductor, and a semiconductor region thereon, and an electrode, provided on the semiconductor region, extending in a direction of a waveguide axis in the laser device. The c-axis of the nitride semiconductor is inclined at an angle ALPHA relative to a normal axis to the semipolar surface toward the waveguide axis direction. The laser structure includes first and second fractured faces intersecting with the waveguide axis. A laser cavity of the laser device includes the first and second fractured faces extending from edges of first and second faces. The first fractured face includes a step provided at an end face of an InGaN layer of the semiconductor region and extending in a direction from one side face to the other of the laser device.
Public/Granted literature
- US20120269220A1 III-NITRIDE SEMICONDUCTOR LASER DEVICE AND METHOD FOR FABRICATING III-NITRIDE SEMICONDUCTOR LASER DEVICE Public/Granted day:2012-10-25
Information query