Invention Grant
US08961744B2 System and method for recycling high-boiling-point waste photoresist stripper
有权
用于回收高沸点废光致抗蚀剂剥离剂的系统和方法
- Patent Title: System and method for recycling high-boiling-point waste photoresist stripper
- Patent Title (中): 用于回收高沸点废光致抗蚀剂剥离剂的系统和方法
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Application No.: US14184159Application Date: 2014-02-19
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Publication No.: US08961744B2Publication Date: 2015-02-24
- Inventor: Ho Kyung Lee , In Gyoo Lee , Myung Jun Park , Kee-Kahb Koo , Jae-Kyeong Kim
- Applicant: Korex Corporation
- Applicant Address: KR Anyang-Si, Gyeonggi-Do
- Assignee: Korex Corporation
- Current Assignee: Korex Corporation
- Current Assignee Address: KR Anyang-Si, Gyeonggi-Do
- Agency: Lowe Hauptman & Ham, LLP
- Priority: KR10-2013-0019743 20130225; KR10-2013-0023760 20130306
- Main IPC: B01D3/14
- IPC: B01D3/14 ; B01D15/00 ; B01D5/00 ; G03F7/42

Abstract:
In a system and method for recycling a high-boiling-point waste photoresist stripper generated in processes of manufacturing LCDs or semiconductor devices, an expensive high-boiling-point stripper solvent can be easily recycled at high yield and high-purity electronic grade. This system includes a first distillation device for removing low-boiling-point impurities, a second distillation device for recycling a stripper solvent composition while removing high-boiling-point impurities, and a third distillation device for removing trace water, thus recovering the stripper solvent composition, and further includes a fourth distillation device for additionally recycling a stripper solvent, thus additionally recovering a high-boiling-point stripper solvent, and this method includes removing low-boiling-point impurities, recycling a stripper solvent composition while removing high-boiling-point impurities, and removing trace water, thus recovering the stripper solvent composition, and further includes additionally recycling a stripper solvent.
Public/Granted literature
- US20140238840A1 SYSTEM AND METHOD FOR RECYCLING HIGH-BOILING-POINT WASTE PHOTORESIST STRIPPER Public/Granted day:2014-08-28
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