Invention Grant
US08961744B2 System and method for recycling high-boiling-point waste photoresist stripper 有权
用于回收高沸点废光致抗蚀剂剥离剂的系统和方法

System and method for recycling high-boiling-point waste photoresist stripper
Abstract:
In a system and method for recycling a high-boiling-point waste photoresist stripper generated in processes of manufacturing LCDs or semiconductor devices, an expensive high-boiling-point stripper solvent can be easily recycled at high yield and high-purity electronic grade. This system includes a first distillation device for removing low-boiling-point impurities, a second distillation device for recycling a stripper solvent composition while removing high-boiling-point impurities, and a third distillation device for removing trace water, thus recovering the stripper solvent composition, and further includes a fourth distillation device for additionally recycling a stripper solvent, thus additionally recovering a high-boiling-point stripper solvent, and this method includes removing low-boiling-point impurities, recycling a stripper solvent composition while removing high-boiling-point impurities, and removing trace water, thus recovering the stripper solvent composition, and further includes additionally recycling a stripper solvent.
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