Invention Grant
- Patent Title: Templates having high contrast alignment marks
- Patent Title (中): 具有高对比度对准标记的模板
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Application No.: US13021461Application Date: 2011-02-04
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Publication No.: US08961852B2Publication Date: 2015-02-24
- Inventor: Kosta S. Selinidis
- Applicant: Kosta S. Selinidis
- Applicant Address: US TX Austin
- Assignee: Canon Nanotechnologies, Inc.
- Current Assignee: Canon Nanotechnologies, Inc.
- Current Assignee Address: US TX Austin
- Agent Cameron A. King
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B82Y10/00 ; B82Y40/00
Abstract:
Described are systems and methods for formation of templates having alignment marks with high contrast material. High contrast material may be positioned within recesses of alignment marks.
Public/Granted literature
- US20110192302A1 Templates Having High Contrast Alignment Marks Public/Granted day:2011-08-11
Information query
