Invention Grant
- Patent Title: Pixelated imager with motfet and process
- Patent Title (中): Pixelated成像器与motfet和过程
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Application No.: US13713744Application Date: 2012-12-13
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Publication No.: US08962377B2Publication Date: 2015-02-24
- Inventor: Chan-Long Shieh , Gang Yu
- Applicant: Chan-Long Shieh , Gang Yu
- Applicant Address: US CA Goleta
- Assignee: Cbrite Inc.
- Current Assignee: Cbrite Inc.
- Current Assignee Address: US CA Goleta
- Agency: Parsons & Goltry
- Agent Robert A. Parsons; Michael W. Goltry
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/20 ; H01L31/0368 ; H01L31/0376

Abstract:
A method of fabricating a pixelated imager includes providing a substrate with bottom contact layer and sensing element blanket layers on the contact layer. The blanket layers are separated into an array of sensing elements by trenches isolating adjacent sensing elements. A sensing element electrode is formed adjacent each sensing element overlying a trench and defining a TFT. A layer of metal oxide semiconductor (MOS) material is formed on a dielectric layer overlying the electrodes and on an exposed upper surface of the blanket layers defining the sensing element adjacent each TFT. A layer of metal is deposited on each TFT and separated into source/drain electrodes on opposite sides of the sensing element electrode. The metal forming one of the S/D electrodes contacts the MOS material overlying the exposed surface of the semiconductor layer, whereby each sensing element in the array is electrically connected to the adjacent TFT by the MOS material.
Public/Granted literature
- US20140167046A1 PIXELATED IMAGER WITH MOTFET AND PROCESS Public/Granted day:2014-06-19
Information query
IPC分类: