Invention Grant
US08963102B2 Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy
有权
带电粒子束显微镜,带电粒子束显微镜的样品架,带电粒子束显微镜
- Patent Title: Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy
- Patent Title (中): 带电粒子束显微镜,带电粒子束显微镜的样品架,带电粒子束显微镜
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Application No.: US14373359Application Date: 2013-01-11
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Publication No.: US08963102B2Publication Date: 2015-02-24
- Inventor: Ruriko Tsuneta , Hideki Kikuchi , Hideo Kashima
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2012-009554 20120120
- International Application: PCT/JP2013/050355 WO 20130111
- International Announcement: WO2013/108711 WO 20130725
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/20

Abstract:
An apparatus that can capture a rotation series of images of an observation area within a range of −180° to +180° around the x axis thereof, and can capture a rotation series of images of the observation area within a range of −180° to +180° around the y axis thereof. The apparatus includes a sample mounting base having at its tip portion a mounting portion for mounting a sample thereon; a rotating jig having a mounting base holding portion that holds the sample mounting base; a sample holding rod that includes a holding portion that holds the rotating jig; a first rotation control unit that applies, to the sample holding rod, a first rotation within a range of −180° to +180° with the extending direction of the sample holding rod as the axis thereof; and a second rotation control unit that applies, to the rotating jig, a second rotation within a range of ±45° or more with the direction orthogonal to the rotation axis of the first rotation as the axis thereof, the sample mounting base being in a conical or polygonally conical form.
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