Invention Grant
US08963102B2 Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy 有权
带电粒子束显微镜,带电粒子束显微镜的样品架,带电粒子束显微镜

Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy
Abstract:
An apparatus that can capture a rotation series of images of an observation area within a range of −180° to +180° around the x axis thereof, and can capture a rotation series of images of the observation area within a range of −180° to +180° around the y axis thereof. The apparatus includes a sample mounting base having at its tip portion a mounting portion for mounting a sample thereon; a rotating jig having a mounting base holding portion that holds the sample mounting base; a sample holding rod that includes a holding portion that holds the rotating jig; a first rotation control unit that applies, to the sample holding rod, a first rotation within a range of −180° to +180° with the extending direction of the sample holding rod as the axis thereof; and a second rotation control unit that applies, to the rotating jig, a second rotation within a range of ±45° or more with the direction orthogonal to the rotation axis of the first rotation as the axis thereof, the sample mounting base being in a conical or polygonally conical form.
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