Invention Grant
- Patent Title: Simultaneous isolation trench and handle wafer contact formation
- Patent Title (中): 同时隔离沟槽和处理晶圆接触形成
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Application No.: US14105417Application Date: 2013-12-13
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Publication No.: US08963281B1Publication Date: 2015-02-24
- Inventor: Christopher S. Blair
- Applicant: Maxim Integrated Products, Inc.
- Applicant Address: US CA San Jose
- Assignee: Maxim Integrated Products, Inc.
- Current Assignee: Maxim Integrated Products, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Advent, LLP
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L29/06 ; H01L21/762

Abstract:
Techniques are described to simultaneously form an isolation trench and a handle wafer contact without additional mask steps. In one or more implementations, an isolation trench and a handle wafer contact trench are simultaneously formed in a substrate. The substrate includes an insulating layer that defines a trench bottom of the handle wafer contact trench. A handle wafer is bonded to a bottom surface of the substrate. An oxide insulating layer is deposited in the isolation trench and the handle wafer contact trench. The oxide insulating layer is then etched so that the oxide insulating layer covering the trench bottom is at least partially removed. The trench bottom is then etched so that a top surface of the handle wafer is at least partially exposed. The handle wafer contact trench may then be at least partially filled with an electrical conductive material.
Information query
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