Invention Grant
- Patent Title: Piezoelectric device and method for manufacturing thereof
- Patent Title (中): 压电元件及其制造方法
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Application No.: US13310109Application Date: 2011-12-02
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Publication No.: US08963403B2Publication Date: 2015-02-24
- Inventor: Takashi Yamane
- Applicant: Takashi Yamane
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2010-272460 20101207
- Main IPC: H03H9/13
- IPC: H03H9/13 ; H03H3/04 ; H03H9/56

Abstract:
In a piezoelectric device, a lower covering layer, a piezoelectric material layer, a lower electrode layer, and an upper electrode layer, which define common layers, and an upper covering layer, which defines a specific layer, are laminated on a substrate. The piezoelectric material layer is sandwiched between a pair of electrodes. First to third vibration regions are provided in which the electrodes are superimposed with the piezoelectric material layer therebetween when viewed in a transparent manner in the direction in which the layers are laminated. The upper covering layer includes only a portion having with a first thickness in the first vibration region, includes a portion having the first thickness and a portion having a second thickness that is smaller than the first thickness in the second vibration region, and includes only a portion having the second thickness in the third vibration region.
Public/Granted literature
- US20120139392A1 PIEZOELECTRIC DEVICE AND METHOD FOR MANUFACTURING THEREOF Public/Granted day:2012-06-07
Information query
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