Invention Grant
US08963569B2 Semiconductor chip probe and the conducted EME measurement apparatus with the semiconductor chip probe
有权
半导体芯片探针和带有半导体芯片探针的导电EME测量装置
- Patent Title: Semiconductor chip probe and the conducted EME measurement apparatus with the semiconductor chip probe
- Patent Title (中): 半导体芯片探针和带有半导体芯片探针的导电EME测量装置
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Application No.: US13921973Application Date: 2013-06-19
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Publication No.: US08963569B2Publication Date: 2015-02-24
- Inventor: Yin-Cheng Chang , Da-Chiang Chang
- Applicant: National Applied Research Laboratories
- Applicant Address: TW Hsinchu
- Assignee: National Applied Research Laboratories
- Current Assignee: National Applied Research Laboratories
- Current Assignee Address: TW Hsinchu
- Agency: Bacon & Thomas PLLC
- Agent Juan Carlos A. Marquez
- Priority: TW102111740A 20130401
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R1/067

Abstract:
The present invention discloses a semiconductor chip probe for measuring conducted electromagnetic emission (EME) of a bare die and a conducted EME measurement apparatus with the semiconductor chip probe. The semiconductor chip probe comprises a substrate, a dielectric layer, an impedance unit, a measuring unit and a connection unit. The measurement apparatus comprises a semiconductor chip probe, a high frequency probe, a signal cable and a test receiver. The integrated passive component network designed and embedded inside the semiconductor chip probe forms the 1Ω or 150Ω impedance network. And the semiconductor chip probe is able to directly couple the EME conducted current or voltage from the test pin of the flipped chip under test to the test receiver for measurement.
Public/Granted literature
- US20140292364A1 SEMICONDUCTOR CHIP PROBE AND THE CONDUCTED EME MEASUREMENT APPARATUS WITH THE SEMICONDUCTOR CHIP PROBE Public/Granted day:2014-10-02
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