Invention Grant
- Patent Title: Optical assembly
- Patent Title (中): 光学组件
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Application No.: US13235750Application Date: 2011-09-19
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Publication No.: US08964162B2Publication Date: 2015-02-24
- Inventor: Damian Fiolka , Wilfried Clauss
- Applicant: Damian Fiolka , Wilfried Clauss
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102009014701 20090327
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B17/08 ; G02B26/08

Abstract:
An optical assembly has at least one mirror with a mirror body. The latter is carried by a support body, which has a first support body portion and a second support body portion. An at least thermally separating region is arranged between the two support body portions. At least one surface portion of at least one of the support body portions or of a body thermally coupled thereto is modified in such a way that a thermal emission coefficient εm of the modified surface portion differs from a thermal emission coefficient εu of the unmodified surface portion by at least 10%. The result is an optical assembly, in which an improved thermal stability is achieved by the predetermining of the thermal emission coefficients.
Public/Granted literature
- US20120019799A1 OPTICAL ASSEMBLY Public/Granted day:2012-01-26
Information query
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