Invention Grant
US08964165B2 Optical apparatus with adjustable action of force on an optical module
有权
在光学模块上具有可调力作用的光学装置
- Patent Title: Optical apparatus with adjustable action of force on an optical module
- Patent Title (中): 在光学模块上具有可调力作用的光学装置
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Application No.: US12963317Application Date: 2010-12-08
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Publication No.: US08964165B2Publication Date: 2015-02-24
- Inventor: Yim-Bun Patrick Kwan
- Applicant: Yim-Bun Patrick Kwan
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102008027540 20080610
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B7/02
Abstract:
The disclosure pertains to an optical apparatus, in particular for microlithography, that includes an optical module, a support structure and a connection apparatus. The connection apparatus includes at least one connection unit which includes a first connector part and a second connector part. The first connector part is connected to the optical module, and the second connector part is connected to the support structure.
Public/Granted literature
- US20110085239A1 OPTICAL APPARATUS WITH ADJUSTABLE ACTION OF FORCE ON AN OPTICAL MODULE Public/Granted day:2011-04-14
Information query
IPC分类:
