Invention Grant
- Patent Title: Method for manufacturing a switching element
- Patent Title (中): 开关元件的制造方法
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Application No.: US13342289Application Date: 2012-01-03
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Publication No.: US08966731B2Publication Date: 2015-03-03
- Inventor: Tatsuya Honda
- Applicant: Tatsuya Honda
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2007-078558 20070326
- Main IPC: H01L41/27
- IPC: H01L41/27 ; H01L41/29 ; H05K3/10 ; H05K3/18 ; H05K3/12 ; G02F1/1368 ; H01L27/20 ; H01L41/09 ; H01L23/48 ; H01H57/00

Abstract:
A method for manufacturing a switching element which has enough resistance to repeat switching operations and which can be miniaturized and have low power consumption, and a display device including the switching element are provided. The switching element includes a first electrode to which a constant potential is applied, a second electrode adjacent to the first electrode, and a third electrode over the first electrode with a spacer layer formed of a piezoelectric material interposed therebetween and provided across the second electrode such that there is a gap between the second electrode and the third electrode. A potential which is different from or approximately the same as a potential of the first electrode is applied to the third electrode to expand and contract the spacer layer, so that a contact state or a noncontact state between the second electrode and the third electrode can be selected.
Public/Granted literature
- US20120100284A1 Switching Element, Method For Manufacturing The Same, And Display Device Including Switching Element Public/Granted day:2012-04-26
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